Fabrication, Assembly and Testing of a new X-Y Flexure Stage with substantially zero Parasitic Error Motions

Once these features are analytically and experimentally verified, they can lead to significant advantages in terms of range of motion, accuracy of motion and simplicity in motion control. Most parallel kinematics flexures have a limited range of motion since larger motions induce non-linearity and parasitic coupling, which in turn limits accuracy. Despite being parallel mechanisms, the proposed designs allow for relatively larger range of motion due to their unique arrangement of flexure building blocks. While repeatability is guaranteed by any monolithic flexure design, the proposed designs also allows for Computer with dSpace Cap-probe Driver